JPH0244222B2 - - Google Patents

Info

Publication number
JPH0244222B2
JPH0244222B2 JP59155939A JP15593984A JPH0244222B2 JP H0244222 B2 JPH0244222 B2 JP H0244222B2 JP 59155939 A JP59155939 A JP 59155939A JP 15593984 A JP15593984 A JP 15593984A JP H0244222 B2 JPH0244222 B2 JP H0244222B2
Authority
JP
Japan
Prior art keywords
diamond
film
amorphous carbon
carbon film
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59155939A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6133645A (ja
Inventor
Takahiro Imai
Akira Doi
Naoharu Fujimori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP59155939A priority Critical patent/JPS6133645A/ja
Publication of JPS6133645A publication Critical patent/JPS6133645A/ja
Publication of JPH0244222B2 publication Critical patent/JPH0244222B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measurement Of The Respiration, Hearing Ability, Form, And Blood Characteristics Of Living Organisms (AREA)
JP59155939A 1984-07-25 1984-07-25 生体用センサ− Granted JPS6133645A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59155939A JPS6133645A (ja) 1984-07-25 1984-07-25 生体用センサ−

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59155939A JPS6133645A (ja) 1984-07-25 1984-07-25 生体用センサ−

Publications (2)

Publication Number Publication Date
JPS6133645A JPS6133645A (ja) 1986-02-17
JPH0244222B2 true JPH0244222B2 (en]) 1990-10-03

Family

ID=15616821

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59155939A Granted JPS6133645A (ja) 1984-07-25 1984-07-25 生体用センサ−

Country Status (1)

Country Link
JP (1) JPS6133645A (en])

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0627284Y2 (ja) * 1986-12-24 1994-07-27 三菱マテリアル株式会社 複合ドリル
FR2704314A1 (fr) * 1993-02-17 1994-10-28 Acfg Capteur, son procédé de fabrication et son application à la mesure.
US7153651B1 (en) 1996-10-31 2006-12-26 Inverness Medical - Biostar, Inc. Flow-through optical assay devices providing laminar flow of fluid samples, and methods of construction thereof
JP3313696B2 (ja) * 2000-03-27 2002-08-12 科学技術振興事業団 電界効果トランジスタ
FR2872914B1 (fr) * 2004-07-07 2006-10-13 Univ Rennes I Etablissement Pu Capteur pour la detection et/ou la mesure d'une concentration de charges electriques contenues dans une ambiance, utilisations et procede de fabrication correspondants
JP2007078373A (ja) * 2005-09-12 2007-03-29 National Institute Of Advanced Industrial & Technology ISFETからなるpHセンサー及びその製造方法
JP6687862B2 (ja) * 2015-06-30 2020-04-28 富士通株式会社 ガスセンサ及びその使用方法

Also Published As

Publication number Publication date
JPS6133645A (ja) 1986-02-17

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